초크랄스키 방법으로 성장한 CaF2 단결정 분석
Analysis of calcium fluoride single crystal grown by the czochralski method
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초록
광학 윈도우, 프리즘, 렌즈 등에 사용되는 CaF₂ 단결정은 3개의 부격자를 가진 face-centered cubic(FCC) 구조를 가지고 있으며 밴드갭(12 eV)이 크고 넓은 파장영역에서 투과율이 우수하고 굴절률이 낮다는 특징이 있다. CaF₂ 단결정 성장은 대표적으로 높은 생산효율과 큰 결정을 만들 수 있는 초크랄스키(Czochralski) 방법으로 생산되고 있다. 이 연구에서는 초크랄스키 방법으로 성장한 일본의 Nikon 사와 미국의 MTI 사 (100)면, (111)면의 CaF₂ 단결정 상용화 웨이퍼의 결정성과 결함밀도를 분석하기 위해 X선 회절(XRD), XRC(X-ray rocking curve) 측정 및 Chemical Etching을 수행하였고 푸리에 변환 적외선 분광법(FT-IR)과 UV-VIS-NIS을 이용하여 CaF₂ 결정의 광학적 특성을 분석하였다. 다양한 분석 결과를 통해 CaF₂단결정의 다양한 분야에서의 응용가능성을 체계적으로 살펴보았다.
Abstract
CaF₂ single crystal has a large band gap (12 eV), and it is used for optical windows, prisms, and lenses due to its excellent transmittance in a wide wavelength range and low refractive index. Moreover, it is expected to be one of the materials for ultraviolet transmissive laser optical components. CaF₂ belongs to the fluoride compounds and has a face-centered cubic (FCC) structure with three sub-lattices. The representative method for CaF₂ single crystal growth is Czochralski, which method has the advantages of high production efficiency and the ability to make large crystals. In this study, X-ray diffraction (XRD), X-ray rocking curves (XRC) measurement, and chemical etching were performed to analyze the crystallinity and defect density of the CaF₂ single crystals, grown by the Czochralski method. Fourier-transform infrared spectroscopy (FT-IR) and UVVIS-NIR spectroscopy systems were used to investigate the optical properties of the CaF₂ crystal. The provability of various applications, including UV application, was systematically investigated with various analysis results.
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